TY  - SER
AU  - Shao, L
AU  - Palaniapan, M
AU  - Khine, Y. Y
TI  - Micromechanical Resonators with  Submicron Capacitive Gaps in 2 ?M Process
KW  - Integrated Circuits
KW  - Micro-Mechanical Model
KW  - Sub-Micron Devices
ER  -