Shao, L Palaniapan, M Khine, Y. Y <br/><br/>
Micromechanical Resonators with  Submicron Capacitive Gaps in 2 ?M Process 

 - 1427-1427 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Circuits<br/>Micro-Mechanical Model<br/>Sub-Micron Devices