Yoo, Yong-Min Kwon, byung-II <br/><br/>
A Dual-Servo Type Vcm  for  a Nano-Level Meaaurement System 

 - 50-54 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dual-Servo<br/>Finite - Element Analysis<br/>Measurement System Analysis