Herrmann, M Richter, F. <br/><br/>
Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence 

 - 64-85 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films<br/>Complete Consideration OfSubstrate Influence<br/>Indentation