Lee, Dae Hoon Lee, Jae-Oh Kim, Kwan-Tae <br/><br/>
Characteristics of Plasma-Assisted Hydrocarbon Scr System 

 - 11718-11726 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Re Forming<br/>Plasma<br/>Hydrocarbon-Scr