TY  - SER
AU  - Jung, Eun Sik
AU  - Kyoung, Sin Su
AU  - Kang, Ey Goo
TI  - Design and Fabrication of Super Junction Mosfet Based on Trench Fililng and Bottom Implantation Process
KW  - Charge Balancing
KW  - Trench Angle
KW  - Bottom Implantation
ER  -