TY  - BOOK
AU  - Campbell, Stephen A.
TI  - The Science and Engineering of Microelectronic Fabrication 
SN  - 0195105087
U1  - 621.38152 
PY  - 1996///
CY  - New York : 
PB  - Oxford University Press, 
KW  - Semiconductors Design and Construction
N1  - YY
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-19-510508-7.pdf
ER  -