Campbell, Stephen A. <br/><br/>
The Science and Engineering of Microelectronic Fabrication  

 - New York :   Oxford University Press,   c1996 
 - XV, 536 p.  : ill 
 - Oxford Series in Electrical Engineering .
<br/><br/>Includes Bibliographical References and Index 
<br/><br/><label>ISBN: </label>0195105087 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors Design and Construction
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM