TY  - BOOK
AU  - Elliott, David J.
TI  - MicroLithography Process Technology for Ic Fabrication 
SN  - 0070193045
U1  - 621.38173 
PY  - 1986///
CY  - New York : 
PB  - McGraw-Hill, 
KW  - Integrated Circuits Very Large Scale Integration Design and Construction
KW  - Photoresists
N1  - NN
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-07-019304-5.pdf
ER  -