Elliott, David J. <br/><br/>
MicroLithography Process Technology for Ic Fabrication  

 - New York :   McGraw-Hill,   c1986 
 - XIX, 378 p. 
<br/><br/>
<br/><br/><label>ISBN: </label>0070193045 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Circuits Very Large Scale Integration Design and Construction<br/>Photoresists
<br/><br/><label>Dewey Class. No.: </label>621.38173  / ELL