TY  - BOOK
AU  - Lysherski, Sergey Edward
TI  - Mems and Nems Systems Devices and Structures 
SN  - 0849312620
U1  - 621.381 
PY  - 2002///
CY  - Boca Raton : 
PB  - CRC Press, 
KW  - Microelectronical System
N1  - NN
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-8493-1262-0.pdf
ER  -