Lysherski, Sergey Edward <br/><br/>
Mems and Nems Systems Devices and Structures  

 - Boca Raton :   CRC Press,   c2002 
 - 461 p.  : ill 
 - Nano and Microscience Engineering Technology and Medicine Series .
<br/><br/>
<br/><br/><label>ISBN: </label>0849312620 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronical System
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYS