TY  - BOOK
AU  - May, Gary S.
AU  - Spanos, Costas J.
TI  - Fundamentals of Semiconductor Manufacturing and Process Control 
SN  - 0471784060
U1  - 621.38152 
PY  - 2006///
CY  - Hoboken, Nj : 
PB  - Ieee/Wiley Interscience, 
KW  - Integrated Circuits Design and Construction
KW  - Process Control Statistical Methods
KW  - Semiconductors Design and Construction
N1  - YY
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-471-78406-0.pdf
ER  -