May, Gary S. <br/><br/>
Fundamentals of Semiconductor Manufacturing and Process Control  

 - Hoboken, Nj :   Ieee/Wiley Interscience,   c2006 
 - XIX, 463 p.  : ill 
<br/><br/>Includes Bibliographical References and Index 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Circuits Design and Construction<br/>Process Control Statistical Methods<br/>Semiconductors Design and Construction
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY