TY  - BOOK
AU  - Huang, Qing-An
TI  - Micro Electro Mechanical Systems 2
SN  - 9789811059445
U1  - 621.381 
PY  - 2018///
CY  - Singapore : 
PB  - Springer, 
KW  - Microelectromechanical Systems
KW  - Nanotechnology
N1  - YY; v. 2.
UR  - https://link.springer.com/referencework/10.1007/978-981-10-5945-2?page=1#toc
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/978-981-10-5944-5.pdf
ER  -