Huang, Qing-An <br/><br/>
Micro Electro Mechanical Systems 2 

 - Singapore :   Springer,   c2018 
 - XXIV, 659-1479 p.  : ill 
 - Micro Nano Technologies .
<br/><br/>Includes Bibliographical References and Index 
<br/><br/>v. 2.   
<br/><br/><label>ISBN: </label>9789811059445 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical Systems<br/>Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>621.381  / HUA