Mems Applications 3 

 - 2nd 
 - Boca Raton :   Taylor and Francis,   c2006 
 - vp.  : ill 
 - Mechanical Engineering Series .
<br/><br/>Includes Bibliographical References and Index 
<br/><br/>v. 3.   
<br/><br/><label>ISBN: </label>0849391393 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors Handbooks Manuals<br/>Microactuators Handbooks Manuals<br/>Microelectromechanical Systems Handbooks Manuals
<br/><br/><label>Dewey Class. No.: </label>621.38102  / MEM