TY  - BOOK
AU  - Gad-El-Hak, Mohamed
TI  - Mems Design and Fabrication 2
SN  - 0849391385
U1  - 621.38102 
PY  - 2006///
CY  - Boca Raton : 
PB  - Taylor and Francis, 
KW  - Microelectromechanical Systems Design and Construction Handbooks Manuals
KW  - Microelectromechanical Systems Handbooks Manuals
KW  - Microfabrication Handbooks Manuals
N1  - YY; v. 2.
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-8493-9138-5.pdf
ER  -