Study onDeposition Profile Characterstics InMicron-Scale Trench Using Direct Simulation Monticarlo Method

By: Material type: ArticleArticleDescription: 296-302 pSubject(s): In: Transactions ofAsme, Journal of Fluids Engineering
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Item type Current library Call number Vol info Status Date due Barcode
Articles Articles Periodical Section Vol.120, No.2 (Jun. 1998) Available

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