A Comprehensive Study of Indium Implantation-Induced Damage Indeep Submicrometer Nmosfet: Device Characterization and Damage Assessment

By: Material type: ArticleArticleDescription: 2254-2262 pSubject(s): In: Ieee Transactions on Electron Devices
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Articles Articles Periodical Section Vol.49, No.12 (Dec. 2002) Available