A Reliability of Barrier-Metal-Clad Copper Interconnects with Self-Aligned Metallic Caps

By: Material type: ArticleArticleDescription: 2129-2135 pSubject(s): In: Ieee Transactions on Electron Devices
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Item type Current library Call number Vol info Status Date due Barcode
Articles Articles Periodical Section Vol.51, No.12 (Dec. 2004) Available

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