Feature-Scale Process Simulation and Accurate Capacitance Extraction for Backend of A 100-Nm Aluminum/Teos Process

By: Material type: ArticleArticleDescription: 1129-1134 pSubject(s): In: Ieee Transactions on Electron Devices
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Item type Current library Call number Vol info Status Date due Barcode
Articles Articles Periodical Section Vol.51, No.07 (Jul. 2004) Available

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