Analysis and Calibration of Transient Enhanced Diffusion for Indium Impurity in Nanoscale Semiconductor Devices

By: Material type: ArticleArticleDescription: 18-22 pSubject(s): In: International Transactions on Electrophysics and Applications
Holdings
Item type Current library Call number Vol info Status Date due Barcode
Articles Articles Periodical Section Vol.5c, No.01 (Feb. 2005) Available