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Process Engineering Analysis in Semiconductor Device Fabrication

By: Contributor(s): Material type: TextTextLanguage: English Series: McGraw-Hill Chemical Engineering SeriesPublication details: New York : McGraw-Hill, c1993Description: XVII, 774 p. : illISBN:
  • 0071127445
Subject(s): DDC classification:
  • 621.38152 MID
Online resources:
Holdings
Item type Current library Shelving location Call number Status Date due Barcode
Lending Collection Lending Collection Circulation Section Circulation Section 621.38152 MID Available 62740