Normal view
MARC view
Entry Personal Name
001 - CONTROL NUMBER
- control field: 799688
003 - CONTROL NUMBER IDENTIFIER
- control field: NEDUET
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20230819170425.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 230819|| aca||aabn | a|a d
040 ## - CATALOGING SOURCE
- Original cataloging agency: NEDUET
- Transcribing agency: NEDUET
100 ## - HEADING--PERSONAL NAME
- Personal name: Heitzinger, Clemens
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: (NEDUET)755234: Heitzinger, Clemens, Feature-Scale Process Simulation and Accurate Capacitance Extraction for Backend of A 100-Nm Aluminum/Teos Process