Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 756636

003 - CONTROL NUMBER IDENTIFIER

• control field: NEDUET

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20230819155132.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 230819|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NEDUET
• Transcribing agency: NEDUET

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NEDUET)734856: Herrmann, M 756634, Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence