Study onDeposition Profile Characterstics InMicron-Scale Trench Using Direct Simulation Monticarlo Method (Record no. 794138)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00531nab a2200145Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230808s1998 |||||||f |||| 00| 0 eng d |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Masato, Ikegawa |
| 9 (RLIN) | 852761 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Jun'Ichi, Kobayashi |
| 9 (RLIN) | 852763 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Morihisa, Maruko |
| 9 (RLIN) | 852765 |
| 245 #0 - TITLE STATEMENT | |
| Title | Study onDeposition Profile Characterstics InMicron-Scale Trench Using Direct Simulation Monticarlo Method |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 296-302 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Monte Cario Methods |
| 9 (RLIN) | 755606 |
| 773 ## - HOST ITEM ENTRY | |
| Place, publisher, and date of publication | 1998 |
| Title | Transactions ofAsme, Journal of Fluids Engineering |
| International Standard Serial Number | 00982202 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Articles |
| -- | 51 |
| -- | ABUL KALAM Library |
| Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
|---|---|---|---|---|---|
| Engr Abul Kalam Library | Vol.120, No.2 (Jun. 1998) | 20/08/2023 | Articles |