Novel Method of Low-Vaccum Plasma Triode Sputtering (Record no. 771212)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00460nab a2200157Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230808s2002 |||||||f |||| 00| 0 eng d |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Golan, G. |
| 9 (RLIN) | 811793 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Axelevitch, A. |
| 9 (RLIN) | 811794 |
| 245 #0 - TITLE STATEMENT | |
| Title | Novel Method of Low-Vaccum Plasma Triode Sputtering |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 651-658 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Tetrode Sputtering |
| 9 (RLIN) | 820252 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Silicon |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Titanium Iron |
| 9 (RLIN) | 812322 |
| 773 ## - HOST ITEM ENTRY | |
| Place, publisher, and date of publication | 2002 |
| Title | Microelectronics Journal |
| International Standard Serial Number | 00262692 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Articles |
| -- | 51 |
| -- | ABUL KALAM Library |
| Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
|---|---|---|---|---|---|
| Engr Abul Kalam Library | Vol.33, No.08 (Aug. 2002) | 19/08/2023 | Articles |