Fe Analysis of Plasma Discharge and Sheath Characterization in Dry Etching Reactor (Record no. 712766)

MARC details
000 -LEADER
fixed length control field 00591nab a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s2014 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Jee, Sung Chul
9 (RLIN) 709247
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Lee, Moojae
9 (RLIN) 709248
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Kim, Do Wan
9 (RLIN) 709249
245 #0 - TITLE STATEMENT
Title Fe Analysis of Plasma Discharge and Sheath Characterization in Dry Etching Reactor
300 ## - PHYSICAL DESCRIPTION
Extent 307-312 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Fault Detection and Isolation (Fdi)
9 (RLIN) 709250
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Time Delay
9 (RLIN) 165521
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Parameters Uncertainty
9 (RLIN) 709251
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 2014
Title Journal of Electrical Engineering and Technology
International Standard Serial Number 19750102
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
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-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.09, No.01 (Jan. 2014)   19/08/2023 Articles