A Two-Dimensional Micromachined Accelerometer.
Landsberger, L. M Al-Khalili, A. J Ahmad, H
A Two-Dimensional Micromachined Accelerometer. - 18-26 p.
Microelectromechanical Systems (Mems)
Surface Micromachining
A Two-Dimensional Micromachined Accelerometer. - 18-26 p.
Microelectromechanical Systems (Mems)
Surface Micromachining