Investigation of Cylindrical and Conical Electrostatic Wobble Micromotors

Sarros, T. Chew, E.C. Crase, S. Tay, B.K.

Investigation of Cylindrical and Conical Electrostatic Wobble Micromotors - 129-140 p.


Micromotors
Electrostatic Discharge
Harmonic
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