Accurate and Computationally Efficient Analytical 1-D Ion Implantation Models Based on Legendre Polynomials
Li, D Shrivastav, G Wang, G Chen, Y
Accurate and Computationally Efficient Analytical 1-D Ion Implantation Models Based on Legendre Polynomials - 1172-1182 p.
Analytical Model
Ion Implantation
Modeling
Accurate and Computationally Efficient Analytical 1-D Ion Implantation Models Based on Legendre Polynomials - 1172-1182 p.
Analytical Model
Ion Implantation
Modeling