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Thickness Dependent Soft-Breakdown Phenomena of Low Dielectric Constant Thin Films Corresponding Activation Energy

Lee, S. Kim, W.-H Zhao, Y.

Thickness Dependent Soft-Breakdown Phenomena of Low Dielectric Constant Thin Films Corresponding Activation Energy - 605-608 p.

Subjects--Topical Terms:
Thickness Dependent
Soft-Breakdown
Low Dielectric Constant

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