Fabrication of Micro-Optical Structures By Applying Negative tone Hybrid Glass Materials and Greyscale Lithography

Karkkainen, A.H.O. Rantala, J.T. Descour, M.R.

Fabrication of Micro-Optical Structures By Applying Negative tone Hybrid Glass Materials and Greyscale Lithography - 23-24 p.


Integrated Optoelectronics
Miniaturisation of Optical System
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