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Effects of Substrate Bias on Anaocrystal-(Ti,Ai)Nxi Amorphous-Siny Composite Films

Yau, Bao-Shun

Effects of Substrate Bias on Anaocrystal-(Ti,Ai)Nxi Amorphous-Siny Composite Films - 1985-1990 p.

Subjects--Topical Terms:
Nanocrystal

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