Electromagnetic Micromirror Array with Single-Crystal Silicon Mirror Plate and Aluminum Spring
Ji, Chang-Hyeon
Electromagnetic Micromirror Array with Single-Crystal Silicon Mirror Plate and Aluminum Spring - 584-590 p.
Electromagnetic Forces
Micromachining
Electromagnetic Micromirror Array with Single-Crystal Silicon Mirror Plate and Aluminum Spring - 584-590 p.
Electromagnetic Forces
Micromachining