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Hydrogen Dilution Effect onProperties of Coplanar Amorphous Siliocn Thin-Film Transistors Fabricated by Inductively-Coupled Plasma Cvd

Kim, Sung Ki Choi, Young Jin Jang, Jin

Hydrogen Dilution Effect onProperties of Coplanar Amorphous Siliocn Thin-Film Transistors Fabricated by Inductively-Coupled Plasma Cvd - 1001-1006 p.

Subjects--Topical Terms:
Amorphous Semiconductor
Hydrogen
Silicon

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