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Effects of Nitrogen Implant Activation onSic/Sio Interface of 6h-Sic Self Aligned Nmosfet'S

Lam, M. P. Pan, J. N. Mrlioch, M. R.

Effects of Nitrogen Implant Activation onSic/Sio Interface of 6h-Sic Self Aligned Nmosfet'S - 565-566 p.

Subjects--Topical Terms:
Mosfet
Silicon Carbide

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