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Rapid Thermal Postoxidation Anneal Engineering in Thin Gate Oxides with Al Gates

Chen, Chih-Yao Hwu, Jenn-GWO Jeng, Ming-Jer

Rapid Thermal Postoxidation Anneal Engineering in Thin Gate Oxides with Al Gates - 247-253 p.

Subjects--Topical Terms:
Rapid Thermal
Anneal
Gates

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