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Hydrogenated Amorphous Silicon Thin Film Transistor Fabricated on Plasma Treated Silicon Nitride

lim, byung-Cheon Choi, Young Jin Jang, Jin

Hydrogenated Amorphous Silicon Thin Film Transistor Fabricated on Plasma Treated Silicon Nitride - 367-371 p.

Subjects--Topical Terms:
A-Si H Tft
Threshold Voltage
Subthreshold

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