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Characterization in Silicon Processing

Strausser, Yale

Characterization in Silicon Processing - Boston : Butterworth-Heinemann, c1993 - XIII, 240 p. - Materials Characterization Series .

ISBN: 0750691727

ISSN:

Subjects--Topical Terms:
Electric Conductors
Semiconductor Films
Silicon

Dewey Class. No.: 620.193 / STR

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