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Nano and Micro Electromechanical Systems Fundamentals of Nano and Microengineering

Lysherski, Sergey Edward

Nano and Micro Electromechanical Systems Fundamentals of Nano and Microengineering - 2nd - Boca Raton : CRC Press, c2005 - 722 p. : ill - Nano and Microscience Engineering Technology and Medicine Series .

Includes Bibliographical References and Index

ISBN: 0849328381

ISSN:

Subjects--Topical Terms:
Microelectromechanical Systems
Nanotechnology

Dewey Class. No.: 621.381 / LYS

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