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Silicon Wafer Bonding Technology for VLSI and Mems Applications

Iyer, Subramanian S.

Silicon Wafer Bonding Technology for VLSI and Mems Applications - London : Inspec, c2002 - XXV, 149 p. : ill - Emis Processing Series ; No. 1 .

Includes Index

ISBN: 0852960395

ISSN:

Subjects--Topical Terms:
Integrated Circuits Very Large Scale Integration
Microelectromechanical Systems
Silicon on Insulator Technology

Dewey Class. No.: 621.38152 / IYE

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