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Mems and Nems Systems Devices and Structures

Lysherski, Sergey Edward

Mems and Nems Systems Devices and Structures - Boca Raton : CRC Press, c2002 - 461 p. : ill - Nano and Microscience Engineering Technology and Medicine Series .

ISBN: 0849312620

ISSN:

Subjects--Topical Terms:
Microelectronical System

Dewey Class. No.: 621.381 / LYS

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