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Process Technology for Silicon Carbide Devices

Zetterling, Carl Mikael

Process Technology for Silicon Carbide Devices - London : Inspec, c2002 - XXII, 176 p. : ill - Emis Processing Series ; No. 2 .

Includes Bibliographical References and Index

ISBN: 0852969988

ISSN:

Subjects--Topical Terms:
Silicon Carbide Electric Properties

Dewey Class. No.: 621.38152 / ZET

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