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Fundamentals of Semiconductor Manufacturing and Process Control

May, Gary S.

Fundamentals of Semiconductor Manufacturing and Process Control - Hoboken, Nj : Ieee/Wiley Interscience, c2006 - XIX, 463 p. : ill

Includes Bibliographical References and Index

ISBN: 0471784060

ISSN:

Subjects--Topical Terms:
Integrated Circuits Design and Construction
Process Control Statistical Methods
Semiconductors Design and Construction

Dewey Class. No.: 621.38152 / MAY

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