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Micro Electro Mechanical Systems 2

Huang, Qing-An

Micro Electro Mechanical Systems 2 - Singapore : Springer, c2018 - XXIV, 659-1479 p. : ill - Micro Nano Technologies .

Includes Bibliographical References and Index

v. 2.

ISBN: 9789811059445

ISSN:

Subjects--Topical Terms:
Microelectromechanical Systems
Nanotechnology

Dewey Class. No.: 621.381 / HUA

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